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UltraScan

UltraScan®

The UltraScan family of wafer flatness metrology tools with sorting

Product Highlights:

Industry standard measurements for semiconductor wafer thickness, flatness and shape
High throughput
Configurable multi-cassette sorting capabilities
Expandable and upgradeable

ADE's UltraScan family is ideal for characterizing wafers used by mature fabrication processes.

5 cassettes
180nm line width
Edge exclusion to 1mm
Automated calibration
Sort by parameter
Measures thickness, shape and site flatness on bare wafers
6" wafers (200mm wafers) and smaller
Add-on resistivity and typing gauges

2 cassettes
180nm line width
Edge exclusion to 1mm
Automated calibration
Sort by parameter
Measures thickness, shape and site flatness on bare wafers
6" wafers (200mm wafers) and smaller
Add-on resistivity and typing gauges

5 cassettes
250nm line width
sort by parameter
measures thickness, shape and site flatness on bare wafers
6" wafers (200mm wafers) and smaller

2 cassettes
250nm line width
sort by parameter
measures thickness, shape and site flatness on bare wafers
6" wafers (200mm wafers) and smaller

Applications for this product

Post Polish Geometry

Pre-polish wafer geometry

Incoming Quality Control

Related products

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