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AWIS 3220 FA

 

Product highlights:

  • High throughput at maximum sensitivity
  • Broad dynamic range
  • Superior defect discrimination and classification through angle resolved scatter
  • Execeptional tool-to-tool matching and correlation
  • Single scan operation: Particles, COP's, Scratches, Mounds, Stacking Faults, Slip Lines
  • Superior COP/particle discrimination
  • Optional FA hardware and software

Advanced Wafer Inspection System

ADE's AWIS Systems are fully automatic scanning surface inspection tools that identify and classify particle and crystalline defects on silicon and epi wafers. Modular transports allow full factory automation (FA) and flexible sorting configurations.

Applications for this product

Thin Films Epi

Particle and Defect Detection

Particle and Defect Characterization

Surface QC

IQC

Related products

AcuMap 3220

AFS 3220

 

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