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Thin Films Process Monitoring

Flat particle detected on film

Particle inspection on thin films:

Accurately detect and classify film defects inline on film coated wafers
High sensitivity, even detects flat particles that others miss
Defect classification
Differentiate defects by type and size
Multiple surface and edge inspection options

Products related to this application:

FabVision™ - wafer metrology management

Related applications

SOI & SiGe process control

Photoresist defects and uniformity

Wafer Incoming Quality Control (IQC)

Bare wafer particle inspection

Wafer surface shape

Wafer nanotopography

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