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Thin Films Photoresist

Film thickness measurements:

The AcuMap 3220 system is a high speed film thickness mapping tool for dielectric films. Fully map dielectric film thickness of photoresist, low-K, and SOI. High density full film mapping quickly identifies equipment or process errors.

Products related to this application:

AcuMap™ film thickness measurement

FabVision™ - wafer metrology management

Related applications

SOI & SiGe process control

Thin Films Inspection & Uniformity

Wafer Incoming Quality Control (IQC)

Bare wafer particle inspection

Wafer surface shape

Wafer nanotopography

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