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Thin Films Epi

  • Haze detection

Particle inspection on epitaxial films:

  • Accurately detect and classify film defects inline on epi wafers
  • High sensitivity, even detects flat particles that others miss
  • Defect classification
  • Differentiate defects by type and size
  • Multiple surface and edge inspection options

 

Film thickness measurements:

The AcuMap 3220 system is a high speed film thickness mapping tool for dielectric and epitaxial films. Fully map dielectric film thickness of epitaxial, photoresist, low-K, and SOI. High density full film mapping quickly identifies equipment or process errors.

 

Products for this application:

Episcan 1000

FabVision™

 

Related applications

SOI & SiGe process control

Thin Films Inspection & Uniformity

Wafer Incoming Quality Control (IQC)

Bare wafer particle inspection

Wafer surface shape

Wafer nanotopography

Particle & Defect Classification

 

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