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Surface Quality Control

  • Flat particle detected on film

 

Particle inspection:

  • Accurately detect particles and/or defects inline on bare wafers
  • High sensitivity, even detects flat particles that others miss
  • Defect classification
  • Differentiate defects by type and size
  • Front and back surface inspection, and edge inspection options

The AWIS is an excellent solution to your in-line process monitoring of particle and surface defects. With our patented Angular Resolved Scatter (ARS) technology, the metrology system is able to classify types of defects on the fly -- increases yield, reducing your offline AFM or SEM review time, through smart sampling.

Film inspection for particles and other defects for thin film CMP, epitaxial, photoresist or other films is available for production applications.

Products for this application

Constellation AWIS 3100

AWIS 3220 FA

FabVision™ - wafer metrology management

 

Related applications

Defect classification

Thin films inspection

Film thickness

Film process control

Thin film stress

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