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SOI/SiGe Wafer Production

  • Film thickness uniformity

 

Quickly control processes

  • CMP setup and wear
  • Spin coat variation
  • CVD uniformity
  • SOI production
  • Silicon - Germanium (SiGe) wafer production

 

Related applications

Thin Films Process control

Thin Films Photoresist

 

Related products

FabVision™ - wafer metrology management

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