Particle/Defect Detection

 

Defect detection on semiconductor wafers

ADE surface inspection tools are chosen for their superior sensitivity in particle and defect detection on semiconductor wafers, showing more killer defects. Whether you need to monitor production processes, outgoing quality control (OQC) or incoming quality control (IQC), particle and defect detection systems from ADE offer the a great range of valuable data.

ADE's angle-resolved scatter technology is a patented gauge architecture that extends defect detection inspection to include defect characterization, on the fly.

A family of inspection systems for every application

For defect detection on 300mm bare wafers, check out the AWIS 3200FA for production, or the Constellation AWIS for R&D.