Particle/Defect Classification

 

Classify types and sizes of defects found by inspection tools

Products like AWIS and other defect inspection tools from ADE have capabilities to differentiate defects found on wafers, and thin films.

The defects can be classified by size, shape, or type (embedded, scratches, rip-outs, particles).

Intelligent sampling

When classified, advanced analysis software provided with the tool permits you to display the locations of specific categories of defect. These locations can be inspected offline, by AFM or SEM, avoiding the exhaustive and time consuming hit-or-miss sampling required without particle and defect characterization.

This can be called 'intelligent SEM sampling.'