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AcuMap 3220

• AcuMap Thin Film Uniformity System for 300mm Wafers

High Speed Dielectric Film Mapping System for 300mm Wafers

Product Highlights:

• Fully map dielectric film thickness
  • Photoresist
  • Low-k dielectrics
  • Thick or thin SOI
• Quickly control processes
  • CMP setup and wear
  • Spin coat variation
  • CVD uniformity
  • SOI production

The AcuMap 3220 system is a high speed thickness mapping tool for dielectric films. High density full film mapping quickly identifies equipment or process errors that are not detected by point interpolation methods.

Data plotting examples:

• Film thickness plot on 300mm Wafer

• Contour Plot showing SOI defects

Applications for this product

Thin Films Process Monitoring

Thin Films CMP

Thin Films Photoresist

SOI/SiGe Wafer Production

Related products

AcuMap II for 100-200mm wafers

AcuMap OASys for offline analysis

Thin film defect and contamination detection:

AWIS 3220

Related 300mm metrology:

Wafer Shape and Thickness

Polished Wafer Shape and Thickness

Nanotopography