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WaferCheck® 7200

WaferCheck 7200 system automatically measures and sorts 100 to 200mm wafers

High speed belted sorter

Product Highlights:

10nm resolution
100, 125, 150 and 200mm wafers
Thickness, flatness, bow, warp
Program 40 sort classes
SEMI standard measurement patterns
NIST traceable thickness and resisitivity masters
Worldwide measurement correlation
Wafer slice, grind, lap and polish applications

Flexible Configurations :

Up to 6 senders, 24 receivers
Optional measurements and stations:
Prealigner
Center thickness
Thickness/flatness/bow/warp
- Modular design to meet specific process requirements
Bulk resitivity
Visual inspection
Conductivity type

Productivity Options:

RS232 ASC11 output
DECnet/Ethernet interface
SECS II/GEM protocol
ReportTools application
RecipeTools for setups
MultiReport tool interconnect
Device Toolbox
FabVision integration

Modular Configuration, Automated Operation

The flexible WaferCheck systems can be incorporated into a variety of production and quality environments. Different configurations of WaferCheck 7200 systems are available to meet the measurement and sorting needs at each stop of the wafer production process. Systems configuration is modular with up to six senders and twenty-four receivers. The ASC2000 Controller provides menu based setup and operation, high speed data acquisition, analysis and reporting, and process flexibility.

Applications for this product

Pre-Polish Wafer Sorting

Related products

UltraScan Robotic Sorter

UltraGage Benchtop Sorter

Belted Sorter

FabVision

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