Overview
Silicon wafer metrology, inspection and process control
Wafer: |
Prepolish |
Polished |
Epi |
SOI |
SiGe |
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| Surface Inspection |
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| Nanotopography |
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| Fab and Yield Management |
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Semiconductor product wafer metrology, inspection and process
control
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Incoming Quality |
Unpatterned Films |
CMP & Clean |
Bump & Backgrind |
Patterned Wafers |
MEMS |
| <300mm Thickness/Flatness/
Shape |
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| 300mm/DSP Thickness/Flatness/ Shape |
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| Nanotopography |
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| Edge Effects |
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| Magnetic Films |
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| MRAM |
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Product Families
AFS
ASIQ Stylus Profiler
AWIS
FabVision
HRP250 Stylus Profiler
HRP350 High resolution stylus profiler
NanoMapper
P-16+ Stylus Profiler
S300/
V300
UltraScan
UltraGage
WaferCheck 7200
WaferSight
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